Low-cost piezoresistive silicon load cell independent of force distribution
نویسندگان
چکیده
A silicon load cell (force sensor) is presented which is based on a new operating principle. The force is measured by compressing a meander like strain gage. A second strain gage which is not loaded, is used for temperature compensation and for compensation of bending and stretching stresses in the chip. Also, same changes in zero load resistor values are eliminated. It is shown that the output of the bridge is a linear function of the total force and independent of the force distribution on the silicon chip. Measurements up to 1000 kg show a linear respons and a short term repeatability which is within 0.1 %. Creep after 30 minutes is within 1.2 %.
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High force 10 kN piezoresistive silicon force sensor with output independent of force distribution
A silicon force sensor is realized in which the force is measured by compressing a meander shaped polysilicon strain gage. A second gage which is not loaded, is used for temperature compensation, for compensation of bending and stretching stresses in the chip and for common changes in zero load resistor values. It is shown that the output of the bridge is a linear function of the force and is i...
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